Plasma Technology for Advanced Devices

Materials and Gas Systems in Plasma Etching

Slide 1: General Overview of materials and gas systems relevant for VLSI production

Slide 2: Plasma Etch Chemistries for Materials Systems with Giant (GMR) and Colossal (CMR) Magneto Resistance: NiFe

Slide 3: Plasma Etch Chemistries for Materials Systems with Giant (GMR) and Colossal (CMR) Magneto Resistance: NiMnSb

Slide 4: Plasma Etch Chemistries for Materials Systems with Giant (GMR) and Colossal (CMR) Magneto Resistance: CMR materials

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