| Plasma Processing, Diagnostics, and Etching Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology, 7) by Barry L. Stansfield, Hiroharu Fujita, Minoru Sugawara Principles of Plasma Discharges and Materials Processing by Michael A. Lieberman, Allan J. Lichtenberg Glow Discharge Processes: Sputtering and Plasma Etching by Brian Chapman Principles of Plasma Diagnostics by I. H. Hutchinson Handbook of Advanced Plasma Processing Techniques by R. J. Shul, S. J. Pearton Dry Etching for VLSI by A. J. Van, Roosmalen, A. J., Van Roosmalen, J. a. G., Baggerman Wet/Dry Etch Overview by Texas Engineering Extension Service Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition, and Surface Interactions by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood Plasma Etching: An Introduction (Plasma: Materials Interactions) by Dennis M. Manos, Daniel L Flamm Plasma etching and reactive ion etching by J. W. Coburn Etching in Microsystem Technology by Michael Köhler ICP Emission Spectrometry by Joachim Nölte The Physics and Technology of Ion Sources by Ian G. Brown Industrial Plasma Engineering by J Reece Roth Plasma Processes for Semiconductor Fabrication by W.N.G. Hitchon Plasma Diagnostics, Volume 2: Surface Analysis and Interactions by Orlando Auciello (Editor), Daniel L. Flamm (Editor) Fundamentals of Semiconductor Manufacturing and Process Control by Gary S. May (Author), Costas J. Spanos High Density Plasma Sources: Design, Physics, and Performance by Oleg A. Popov (Editor) Fundamentals of Plasma Physics by Paul M. Bellan Semiconductor Devices Low-Voltage SOI CMOS VLSI Devices and Circuits by James B. Kuo, Shih-Chia Lin Physics of Semiconductor Devices by S. M. Sze Modern Semiconductor Device Physics by S. M. Sze Silicon Processing for the VLSI Era : Process Technology by Stanley Wolf, Richard N. Tauber Silicon Processing for the VLSI Era: Process Integration by Stanley Wolf Silicon Processing for the VLSI Era, Vol. 3 : The Submicron MOSFET by Stanley Wolf Silicon Processing for the VLSI Era: Volume 4 - Deep-Submicron Process Technology by Stanley Wolf Fundamentals of Modern VLSI Devices by Yuan Taur, Tak H. Ning Semiconductor Device Fundamentals by Robert F. Pierret, Katherine Harutunian, Ben S. Bernanke Semiconductor Material and Device Characterization by Dieter K. Schroder Interlayer Dielectrics for Semiconductor Technologies by Shyam Muraka, Moshe Eizenberg, Ashok Sinha Nanotechnology The Science and Technology of Carbon Nanotubes by Kazuyoshi Tanaka, Tokio Yamabee, Kenichi Fukui, T. Yamabe, K. Fukui Carbon Nanotubes and Related Structures by Peter J. F. Harris Springer Handbook of Nanotechnology by Bharat Bhushan Molecular Electronics: Commercial Insights, Chemistry, Devices, Architecture and Programming by James M. Tour Future Trends in Microelectronics : The Nano Millennium by Serge Luryi, Jimmy Xu, Alex Zaslavsky | |
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