Plasma Processing, Diagnostics, and Etching Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology, 7)
by Barry L. Stansfield, Hiroharu Fujita, Minoru Sugawara
Principles of Plasma Discharges and Materials Processing
by Michael A. Lieberman, Allan J. Lichtenberg
Glow Discharge Processes: Sputtering and Plasma Etching
by Brian Chapman
Principles of Plasma Diagnostics
by I. H. Hutchinson
Handbook of Advanced Plasma Processing Techniques
by R. J. Shul, S. J. Pearton
Dry Etching for VLSI
by A. J. Van, Roosmalen, A. J., Van Roosmalen, J. a. G., Baggerman
Wet/Dry Etch Overview
by Texas Engineering Extension Service
Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition, and Surface Interactions
by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood
Plasma Etching: An Introduction (Plasma: Materials Interactions)
by Dennis M. Manos, Daniel L Flamm
Plasma etching and reactive ion etching
by J. W. Coburn
Etching in Microsystem Technology
by Michael Köhler
ICP Emission Spectrometry
by Joachim Nölte
The Physics and Technology of Ion Sources
by Ian G. Brown
Industrial Plasma Engineering
by J Reece Roth
Plasma Processes for Semiconductor Fabrication
by W.N.G. Hitchon
Plasma Diagnostics, Volume 2: Surface Analysis and Interactions
by Orlando Auciello (Editor), Daniel L. Flamm (Editor)
Fundamentals of Semiconductor Manufacturing and Process Control
by Gary S. May (Author), Costas J. Spanos
High Density Plasma Sources: Design, Physics, and Performance by Oleg A. Popov (Editor) Fundamentals of Plasma Physics by Paul M. Bellan Semiconductor Devices Low-Voltage SOI CMOS VLSI Devices and Circuits
by James B. Kuo, Shih-Chia Lin
Physics of Semiconductor Devices
by S. M. Sze
Modern Semiconductor Device Physics
by S. M. Sze
Silicon Processing for the VLSI Era : Process Technology
by Stanley Wolf, Richard N. Tauber
Silicon Processing for the VLSI Era: Process Integration
by Stanley Wolf
Silicon Processing for the VLSI Era, Vol. 3 : The Submicron MOSFET
by Stanley Wolf
Silicon Processing for the VLSI Era: Volume 4 - Deep-Submicron Process Technology
by Stanley Wolf
Fundamentals of Modern VLSI Devices
by Yuan Taur, Tak H. Ning
Semiconductor Device Fundamentals
by Robert F. Pierret, Katherine Harutunian, Ben S. Bernanke
Semiconductor Material and Device Characterization
by Dieter K. Schroder
Interlayer Dielectrics for Semiconductor Technologies
by Shyam Muraka, Moshe Eizenberg, Ashok Sinha
Nanotechnology The Science and Technology of Carbon Nanotubes
by Kazuyoshi Tanaka, Tokio Yamabee, Kenichi Fukui, T. Yamabe, K. Fukui
Carbon Nanotubes and Related Structures
by Peter J. F. Harris
Springer Handbook of Nanotechnology
by Bharat Bhushan
Molecular Electronics: Commercial Insights, Chemistry, Devices, Architecture and Programming
by James M. Tour
Future Trends in Microelectronics : The Nano Millennium
by Serge Luryi, Jimmy Xu, Alex Zaslavsky
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